High-sensitivity surface-profile measurements by heterodyne white-light interferometer

Optical Engineering

Volumn 40, Issue 3, 2001, Pages 387-391

  Hirai, Akiko ^a   Matsumoto, Hirokazu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Heterodyne detection; Profile measurement; Tandem interferometer; White light interferometer

Indexed keywords

COHERENT LIGHT; INTERFEROMETRY; LIGHT INTERFERENCE; OPTICAL FREQUENCY CONVERSION; PROFILOMETRY;

ACOUSTO-OPTIC MODULATORS (AOM);

SURFACE MEASUREMENT;

EID: 0035269443     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1349216     Document Type: Article

References (6)

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