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Volumn 11, Issue 1 III, 2001, Pages 3832-3835

Superconducting transition metal nitride films for THz SIS mixers

Author keywords

Magnetron sputtering; SIS mixers; Transition metals nitrides

Indexed keywords

MAGNESIA; MAGNETRON SPUTTERING; MIXER CIRCUITS; NITRIDES; SPUTTER DEPOSITION; SUPERCONDUCTING TRANSITION TEMPERATURE; THICKNESS MEASUREMENT;

EID: 0035268263     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919900     Document Type: Conference Paper
Times cited : (17)

References (18)
  • 13
    • 0016083153 scopus 로고
    • Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
    • July/August
    • (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666-670
    • Thornton, J.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.