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IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1, 2001, Pages 3824-3827

Effects of geometry and hardware on the stress of Nb thin films

(3) Clark, William W a Beatrice, Joseph M a Lichtenberger, Arthur W a

a University of Virginia (United States)

Author keywords

Magnetron; Nb; Sputter; Stress

Indexed keywords

ELECTRIC PROPERTIES; ELECTRON GUNS; GEOMETRY; LASER APPLICATIONS; MAGNETRON SPUTTERING; NIOBIUM; NUMERICAL ANALYSIS; STRESSES; THERMAL EFFECTS; TUNNEL JUNCTIONS;

ANGLE OF DEPOSITION; INTRINSIC STRESS; NIOBIUM THIN FILMS; SUPERCONDUCTING INSULATING SUPERCONDUCTING JUNCTIONS;

SUPERCONDUCTING FILMS;

EID: 0035267967 PISSN: 10518223 EISSN: None Source Type: Journal
DOI: 10.1109/77.919898 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.