Monolithic integration of laser and passive elements using selective QW disordering by RTA with SiO2 caps of different thicknesses

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 7, Issue 2, 2001, Pages 350-354

  Shimada, Naoyuki ^b   Fukumoto, Yutaka ^b   Uemukai, Masahiro ^b   Suhara, Toshiaki ^a,b   Nishihara, Hiroshi ^a,b   Larsson, Anders ^a,c  

^a IEEE

^b OSAKA UNIVERSITY   (Japan)

^c CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Distributed Bragg reflector lasers; Distributed Bragg reflectors; Integrated optoelectronics; Quantum wells; Quantum well disordering; Quantum well intermixing; Quantum well lasers

Indexed keywords

DISTRIBUTED FEEDBACK LASERS; INTEGRATED OPTOELECTRONICS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL WAVEGUIDES; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

DISTRIBUTED BRAGG REFLECTOR LASER; FABRY-PEROT LASERS; QUANTUM WELL DISORDERING; QUANTUM WELL INTERMIXING; SILICON DIOXIDE CAPS;

QUANTUM WELL LASERS;

EID: 0035263986     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.954149     Document Type: Article

References (10)

1. Quantum well shape modification using vacancy generation and rapid thermal annealing
2. CW and mode-locked integrated extended cavity lasers fabricated using impurity free vacancy disordering
3. Suppression of bandgap shifts in GaAs/AlGaAs quantum wells using strontium fluoride caps
4. Suppression of bandgap shifts in GaAs/AlGaAs multiquantum wells using hydrogen plasma processing
5. 2 encapsulant layer
6. 1-yAs/GaAs multiple quantum wells
7. Highly directional grating outcouplers with tailorable radiation characteristics
8. Monolithically integrated master oscillator power amplifier with grating coupler for collimated output beam
9. Monolithically integrated DBR laser, detector, and transparent waveguide fabricated in a single growth step
10. InGaAs/AlGaAs distributed Bragg reflector lasers with curved surface gratings for monolithic integration