Study of interaction between polyimide and Cu under a high humidity condition

Applied Surface Science

Volumn 171, Issue 1-2, 2001, Pages 101-105

  Nagai, N ^a   Hironaka, T ^a   Imai, T ^a   Harada, T ^a   Nishimura, M ^a   Mimori, R ^a   Ishida, H ^a  

^a TORAY RESEARCH CENTER INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATMOSPHERIC HUMIDITY; COPPER; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); POLYIMIDES; TRANSMISSION ELECTRON MICROSCOPY;

ATTENUATED TOTAL REFLECTION SPECTROSCOPY; INTERFACE REACTIONS; REFLECTION ABSORPTION SPECTROSCOPY;

SURFACE CHEMISTRY;

EID: 0035254723     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00539-0     Document Type: Article

References (9)

1. Mizutani D., Yoneda Y., Ishizuki Y., Yokouchi K. J. Photopolym. Sci. Technol. 10:1997;73.
2. Yoneda Y., Mizutani D., Ishizuki Y., Yokouchi K. J. Photopolym. Sci. Technol. 9:1996;323.
3. Lee K.-W. IBM J. Res. Dev. 38:1994;457.
4. W. Harrick, Internal Reflection Spectroscopy, Wiley, New York, 1967.
5. W.Theiß, The Use of Effective Medium Theories in Optical Spectroscopy in Festkörperproblem, Vol. 33, Helbig (Vieweg, Braunshweig, Wiesbaden, 1994) p. 149.
6. Theiß W., Henkel S., Arntzen M. Thin Solid Films. 255:1995;177.
7. Bruggeman D.A.G. Ann. Phys. (Leipzig). 24:1935;636.
8. O.S. Heaves, Optical Properties of Thin Solid Films, Dover, New York, 1954, p. 46.
9. Harbecke B. Appl. Phys. B39:1986;165.