Novel diffusion protective coatings for copper / polyimide MCM

Journal of Photopolymer Science and Technology

Volumn 10, Issue 1, 1997, Pages 73-78

  Mizutani, Daisuke ^a   Yoneda, Yasuhiro ^a   Ishizuki, Yoshikatsu ^a   Yokouchi, Kishio ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Copper; Polyimide; Protective coating

Indexed keywords

EID: 0003691009     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.10.73     Document Type: Article

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