Formation of silicon nitride layers by nitrogen ion irradiation of silicon biased to a high voltage in an electron cyclotron resonance microwave plasma

Applied Physics Letters

Volumn 72, Issue 10, 1998, Pages 1164-1166

  Ensinger, W ^a   Volz, K ^a   Schrag, G ^a   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001656055     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121001     Document Type: Article

References (16)

1. J. R. Conrad, J. Appl. Phys. 62, 777 (1987).
2. J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and N. C. Tran, J. Appl. Phys. 62, 4591 (1987).
3. N. W. Cheung, Nucl. Instrum. Methods Phys. Res. B 55, 811 (1991).
4. X. Lu, S. S. K. Iyer, J. Liu, C. Hu, N. W. Cheung, J. Min, and P. K. Chu, Appl. Phys. Lett. 70, 1748 (1997).
5. J. J. Vajo, J. D. Williams, R. Wei, R. G. Wilson, and J. N. Matossian, J. Appl. Phys. 76, 5666 (1994).
6. S.-M. Chen, R. M. Gwilliam, and B. J. Sealy, Solid-State Electron. 41, 535 (1997).
7. S.-M. Chen, J. M. Shannon, R. M. Gwilliam, and B. J. Sealy, Nucl. Instrum. Methods Phys. Res. B 127/128, 901 (1997).
8. C. D. Meekison, G. R. Booker, K. J. Reeson, P. L. F. Hemment, R. F. Peart, R. J. Chater, J. A. Kilner, and J. R. Davis, J. Appl. Phys. 69, 3503 (1991).
9. I. H. Wilson, in Ion Beam Modification of Insulators, edited by P. Mazzoldi and G. W. Arnold (Elsevier, Amsterdam, 1987), p. 245.
10. K. J. Reeson, Nucl. Instrum. Methods Phys. Res. B 19/20, 269 (1987).
11. P. H. Chang, C. Slawinski, B. Y. Mao, and H. W. Lam, J. Appl. Phys. 61, 166 (1987).
12. J. Petruzello, T. F. McGhee, M. H. Frommer, V. Rumennik, P. A. Walters, and C. J. Chou, J. Appl. Phys. 58, 4605 (1985).
13. W. Ensinger, J. Hartmann, J. Klein, P. Usedom, B. Stritzker, and B. Rauschenbach, Mater. Res. Soc. Symp. Proc. 396, 521 (1996).
14. K. G. Stephens, K. J. Reeson, B. J. Sealy, R. M. Gwilliam, and P. L. F. Hemment, Nucl. Instrum. Methods Phys. Res. B 59, 368 (1990).
15. S. Wild, P. Grieveson, and K. H. Jack, in Special Ceramics 5, edited by P. Popper (Br. Ceram. Res. Assoc., Stoke-on-Trent, 1972), pp. 385 and 271.
16. K. H. Jack, in Progress in Nitrogen Ceramics, edited by F. L. Riley (Martinus Nijhoff, The Hague, 1983), p. 45.