Nitrogen plasma immersion ion implantation of metals with a 2.45 GHZ microwave source

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1996, Pages 603-606

  Ueda, M ^a   Stellati, C ^a   Barroso, J J ^a   Nono, M C A ^a   Alexander, A ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; MICROWAVE GENERATION; NITROGEN; PLASMA SHEATHS; PLASMA SOURCES; SURFACE TREATMENT;

HIGH VOLTAGE PULSES APPLICATION; PLASMA IMMERSION ION IMPLANTATION; PLASMA OPTIMIZATION;

ION IMPLANTATION;

EID: 0029719967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)