Ion beam milling fabrication of a small off-axis ellipsoidal mirror, diffraction limited to 1 μm resolution at 14 nm

Review of Scientific Instruments

Volumn 72, Issue 2, 2001, Pages 1559-1564

  Mercier, Raymond ^a   Mullot, Michel ^a   Lamare, Michel ^a   Tissot, Gérard ^a  

^a UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035247460     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1340562     Document Type: Article

References (10)

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6. R. Mercier, M. Mullot, M. Lamare, and G. Tissot, Proc. SPIE 3739, 155 (1999).
7. R. Mercier and M. Lamare, Pure Appl. Opt. 6, 773 (1997).
8. J.-P. Chauvineau, D. Decanini, M. Mullot, L. Valiergue, and J.-P. Delaboudiniere, Proc. SPIE 563, 275 (1985).
9. G. Ice, J.-S. Chung, J. Tischler, A. Lunt, and L. Assoufid, Rev. Sci. Instrum. 71, 2635 (2000).
10. R. Mercier, M. Mullot, and M. Lamare, International Conference on Space Optics ICSO 2000, Toulouse, France, p. 99.