High precision cylindrical and quasi-cylindrical aspherization of small surfaces by ion beam figuring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3739, Issue , 1999, Pages 155-160

  Mercier, Raymond ^a   Mullot, Michel ^a   Lamare, Michel ^a   Tissot, Gerard ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPHERICS; ION BEAMS; MASKS; POLISHING; SUBSTRATES; SURFACE ROUGHNESS;

ION BEAM FIGURING; TOROIDAL SURFACES;

MIRRORS;

EID: 0032685598     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (2)