Analytical ultrahigh-vacuum transmission electron microscopy applied to the study of Pd2Si island formation on Si(111) surfaces

Surface and Interface Analysis

Volumn 31, Issue 2, 2001, Pages 68-72

  Takeguchi, Masaki ^a   Tanaka, Miyoko ^a   Yasuda, Hidehiro ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

EDS; EELS; HRTEM; Pd2Si; Si(111); UHVTEM

Indexed keywords

ULTRAHIGH-VACUUM TRANSMISSION ELECTRON MICROSCOPY;

CRYSTAL LATTICES; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; INTERFACES (MATERIALS); PALLADIUM COMPOUNDS; SURFACE CHEMISTRY; SURFACE PHENOMENA; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

SEMICONDUCTING SILICON;

EID: 0035247028     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.957     Document Type: Article

References (17)