Evaluation for compositional deviation between PZT bulk target and its thin film synthesized by YAG laser deposition

Journal of the Ceramic Society of Japan

Volumn 109, Issue 1266, 2001, Pages 149-154

  Kakimoto, K ^a   Kakemoto, H ^a   Masuda, Y ^a  

^a HACHINOHE INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Calibration curve; Ferroelectric thin film; Pb loss; Perovskite structure; Pulsed laser deposition (PLD); PZT; X ray fluorescence (XRF) analysis

Indexed keywords

MORPHOLOGY; PEROVSKITE; PULSED LASER DEPOSITION; SINTERING; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

X-RAY FLUORESCENCE (XRF);

FERROELECTRIC THIN FILMS;

EID: 0035247020     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.109.1266_149     Document Type: Article

References (23)