Experimental and numerical analysis of surface melt dynamics in 200 ns-excimer laser crystallization of a-Si films on glass

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 48-52

  Fogarassy, E ^a   De Unamuno, S ^a   Prevot B ^a   Harrer, T ^b   Maresch, S ^b  

^a Faculté de Médecine   (France)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; EXCIMER LASERS; GLASS; LASER PULSES; LIGHT REFLECTION; MELTING; NUMERICAL ANALYSIS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION;

EXCIMER LASER CRYSTALLIZATION (ELC);

AMORPHOUS FILMS;

EID: 0035246861     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01627-8     Document Type: Article

References (10)

1. Im J.I., Kim H.J., Thompson M.O. Appl. Phys. Lett. 63:1993;1969.
2. Fogarassy E., de Unamuno S., Prévot B., Boher P., Stehle M., Pribat D. Appl. Phys. A68:1999;631.
3. E. Fogarassy and S. de Unamuno, Proc. SPIE Vol.3888 (2000) 229.
4. Wood R.F., Geist G.A. Phys. Rev. Lett. 57:1986;873.
5. Lowndes D.H., Wood R.F., Narayan J. Phys. Rev. Lett. 52:1984;561.
6. Foulon F., Fogarassy E., Slaoui A., Fuchs C., de Unamuno S., Siffert P. Appl. Phys. A45:1988;361.
7. Stiffler S.R., Thompson M.O., Peercy P.S. Phys. Rev. Lett. 60:1988;2519.
8. de Unamuno S., Fogarassy E. Appl. Surf. Sci. 36:1989;1.
9. Thompson M.O., Galvin G.J., Mayer J.W., Peercy P.S., Poate J.M., Jacobson D.C., Cullis A.G., Chew N.G. Phys. Rev. Lett. 52:1984;2360.
10. Murakami K., Eryu O., Takita K., Masuda K. Phys. Rev. Lett. 59:1987;2203.