Super-lateral-growth regime analysis in long-pulse-duration excimer-laser crystallization of a-Si films on SiO2

Applied Physics A: Materials Science and Processing

Volumn 68, Issue 6, 1999, Pages 631-635

  Fogarassy, E ^a   De Unamuno, S ^a   Prevot, B ^a   Boher, P ^b   Stehle, M ^b   Pribat, D ^c  

^a Faculté de Médecine   (France)

^b SOPRA   (France)

^c LCR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; COMPUTER SIMULATION; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; EXCIMER LASERS; LASER PULSES; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICA;

LASER INDUCED CRYSTALLIZATION; LONG PULSE DURATION; SUPER LATERAL GROWTH;

CRYSTALLIZATION;

EID: 0032633469     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050952     Document Type: Article

References (14)

1. T. Sameshima, M. Hara, S. Usui: Jpn. J. Appl. Phys. 28, 1789 (1989)
2. K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko, K. Hotta: IEEE Trans. Electron Devices 36, 2868 (1989)
3. S.D. Brotherton, D.J. McCulloch, J.B. Clegg, J.P. Gowers: IEEE Trans. Electron Devices 40, 407 (1993)
4. E. Fogarassy, H. Pattyn, M. Elliq, A. Slaoui, B. Prevot, R. Stuck, S. de Unamuno, E.L. Mathe: Appl. Surf. Sci. 69, 231 (1993)
5. A. Kohno, T. Sameshima, N. Sano, M. Sekiya, M. Haru: IEEE Trans. Electron Devices 42, 2251 (1995)
6. J.S. Im, H.J. Kim, M.O. Thompson: Appl. Phys. Lett. 63, 1969 (1993)
7. M.O. Thompson, G.J. Galvin, J.W. Mayer, P.S. Peercy, J.M. Poate, D.C. Jacobson, A.G. Cullis, N.G. Chew: Phys. Rev. Lett. 52, 2360 (1984)
8. S.R. Stiffler, M.O. Thompson, P.S. Peercy: Phys. Rev. Lett. 60, 2519 (1988)
9. R.J. Nemanich, S.A. Solin: Phys. Rev. B 20, 392 (1979)
10. S.A. Lyon, R.J. Nemanich, N.M. Johnson, D.K. Biegelsen, Appl. Phys. Lett. 40, 316 (1982)
11. D. Toet, B. Koopmans, P.V. Santos, R.B. Bergmann, B. Richards: Appl. Phys. Lett. 69, 3719 (1996)
12. K. Kitahara, K. Suga, A. Hara, K. Nakajima: Jpn. J. Appl. Phys. 35, L1473 (1996)
13. S. de Unamuno, E. Fogarassy: Appl. Surf. Sci. 36, 1 (1989)
14. H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, H. Kawata, M. Osumi, S. Tsuda, S. Nakano, Y. Kuwano: Jpn. J. Appl. Phys. 30, 3700 (1991)