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Volumn 3888, Issue , 2000, Pages 229-235
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Numerical simulation of the surface melt dynamics in excimer laser crystallization of a-Si films on glass for TFT's applications
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
AMORPHOUS SILICON;
COMPUTER SIMULATION;
CRYSTALLIZATION;
DEPOSITION;
EXCIMER LASERS;
GLASS;
HEAT FLUX;
MELTING;
PULSED LASER APPLICATIONS;
SOLIDIFICATION;
THIN FILM TRANSISTORS;
HEAT FLOW EQUATION;
SUPER-LATERAL GROWTH PHENOMENA;
SURFACE MELT DYNAMICS;
HIGH POWER LASERS;
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EID: 0033898624
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (18)
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