Color-imaging ellipsometer: High-speed characterization of in-plane distribution of film thickness at nano-scale

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 2 A, 2001, Pages 877-880

  Tanooka, Daisuke ^a   Adachi, Eiki ^a,c   Nagayama, Kuniaki ^b  

^a Nippon Laser and Electronics Lab   (Japan)

^b NATIONAL INSTITUTE FOR PHYSIOLOGICAL SCIENCES   (Japan)

^c L'Oreal Tsukuba Center   (Japan)

Author keywords

Ellipsometry; Imaging ellipsometer; In plane distribution; Thickness; Thin film

Indexed keywords

CALCULATIONS; CHARGE COUPLED DEVICES; COLOR IMAGE PROCESSING; OPTICAL DEVICES; PERFORMANCE; THICKNESS MEASUREMENT; THIN FILMS; VIDEO CAMERAS;

COLOR-IMAGING ELLIPSOMETER; IN-PLANE DISTRIBUTION;

ELLIPSOMETRY;

EID: 0035246441     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.877     Document Type: Article

References (12)

1. Advanced materials '93 VI