Optimization of (Ti,Al)N hard coatings by a combinatorial approach

International Journal of Inorganic Materials

Volumn 3, Issue 8, 2001, Pages 1181-1184

  Cremer, R ^a   Neuschutz D ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

AIN; Combinatorial synthesis; Hard coatings; Oxidation resistance; Screening; TiN

Indexed keywords

ALUMINUM; TITANIUM;

CONFERENCE PAPER; FILM; MATERIAL STATE; OXIDATION; SYNTHESIS; TEMPERATURE; THICKNESS;

EID: 0035208781     PISSN: 14666049     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1466-6049(01)00121-0     Document Type: Conference Paper

References (10)