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Volumn 15, Issue 12, 2001, Pages 1403-1416
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Thermal contact resistance and adhesion studies on thin copper films on alumina substrates
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Author keywords
Adhesion; Alumina; Cu films; Thermal contact resistance
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Indexed keywords
ADHESION;
ALUMINA;
ARGON;
HEAT RESISTANCE;
MATHEMATICAL MODELS;
PHYSICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
STRESSES;
SUBSTRATES;
SURFACE PROPERTIES;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
METALLIC FILMS;
THERMAL CONDUCTIVITY OF SOLIDS;
ALUMINA SUBSTRATES;
COPPER FILMS;
SCRATCH TEST;
THERMAL CONTACT RESISTANCE;
COPPER;
INTERFACES (MATERIALS);
ADHESION STUDIES;
ALUMINA SUBSTRATES;
ARGON PRESSURE;
COPPER FILMS;
COPPER THIN FILM;
CRITICAL LOAD;
CU FILMS;
ENHANCEMENT OF HEAT TRANSFER;
INTERFACE PROPERTY;
INTERFACIAL AREAS;
PHOTOTHERMAL METHODS;
PHYSICAL VAPOUR DEPOSITION;
SCRATCH TEST;
STRESS LEVELS;
THERMAL CONTACT RESISTANCE;
THIN COPPER FILMS;
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EID: 0035194018
PISSN: 01694243
EISSN: None
Source Type: Journal
DOI: 10.1163/156856101753213268 Document Type: Article |
Times cited : (13)
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References (12)
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