Multi-project MEMS lecture and laboratory course

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1997, Pages 141-144

  Fuller, Lynn ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; ENGINEERING EDUCATION; INTEGRATED CIRCUIT TESTING; MASKS; MICROELECTRONIC PROCESSING; PROCESS ENGINEERING;

MULTIPROJECT CHIP;

MICROELECTROMECHANICAL DEVICES;

EID: 0031363462     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)