MEMs activity at Rochester Institute of Technology

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1999, Pages 146-149

  Fuller, Lynn ^a   Pham, An ^a   Merwah, Pushkar ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CURRICULA; MICROMACHINING; SENSORS; TEACHING;

MICROMACHINED MULTIPROJECT CHIPS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032639154     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)