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Volumn 1, Issue , 2001, Pages 399-403

Electrostatic chuck with a thin ceramic insulation layer for wafer holding

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTRIC INSULATING MATERIALS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRONICS INDUSTRY; ELECTROSTATICS; HEAT RESISTANCE; POLYETHYLENES; SILICON WAFERS; THIN FILMS; VACUUM;

EID: 0035152072     PISSN: 01972618     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (15)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.