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Volumn 1, Issue , 2001, Pages 399-403
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Electrostatic chuck with a thin ceramic insulation layer for wafer holding
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS;
ELECTRIC INSULATING MATERIALS;
ELECTRIC POTENTIAL;
ELECTRODES;
ELECTRONICS INDUSTRY;
ELECTROSTATICS;
HEAT RESISTANCE;
POLYETHYLENES;
SILICON WAFERS;
THIN FILMS;
VACUUM;
ELECTROSTATIC CHUCK;
SEMICONDUCTOR INDUSTRY;
THIN CERAMIC INSULATION LAYER;
THIN CERAMIC PLATE;
WAFER HOLDING;
ELECTROSTATIC DEVICES;
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EID: 0035152072
PISSN: 01972618
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (15)
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References (5)
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