Fundamental study of an electrostatic chuck for silicon wafer handling

Conference Record - IAS Annual Meeting (IEEE Industry Applications Society)

Volumn 3, Issue , 1997, Pages 1998-2003

  Asano, K ^a   Hatakeyama, F ^a   Yatsuzuka, K ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRODES; ELECTROSTATIC DEVICES; MATERIALS HANDLING EQUIPMENT; SILICON WAFERS; THICK FILMS; THIN FILMS;

ELECTROSTATIC ATTRACTIVE FORCE; ELECTROSTATIC CHUCKS;

CHUCKS;

EID: 0031340492     PISSN: 01972618     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)