Deposition of CrN coatings by current-modulating cathodic arc evaporation

Surface and Coatings Technology

Volumn 137, Issue 1, 2001, Pages 31-37

  Wang, Da Yung ^a   Weng, Ko Wei ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Cathodic are evaporation; Crn; Current modulation; Macroparticles

Indexed keywords

CURRENT MODULATING CATHODIC ARC;

CONTAMINATION; CRYSTAL ORIENTATION; EVAPORATION; STRESS ANALYSIS; THERMAL LOAD;

CHROMIUM COMPOUNDS;

CATHODIC ARC PLASMA DEPOSITION; CHROMIUM NITRIDE; COATING; CORROSION RESISTANCE; WEAR RESISTANCE;

EID: 0035063783     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01111-7     Document Type: Article

References (9)