Spatial profile measurements of charged particles in capacitively-coupled RF (13.56 MHz) oxygen discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 1, 2001, Pages 330-331

  Kaga, K ^a   Kimura, T ^a   Ohe, K ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

EEDF; Electronegativity; Langmuir probe; Negative ion; Oxygen; RF discharge; Spatially profile

Indexed keywords

APPROXIMATION THEORY; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; MATHEMATICAL MODELS; NEGATIVE IONS; PRESSURE EFFECTS; PROBABILITY DISTRIBUTIONS; SPATIAL VARIABLES MEASUREMENT;

ELECTRONEGATIVITY;

HIGH ENERGY PHYSICS;

EID: 0035059429     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.40.330     Document Type: Article

References (10)