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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 1, 2001, Pages 229-233

Enhanced fatigue and data retention characteristics of Pb(Zr, Ti)O3 thin films by the selectively nucleated lateral crystallization method

(2) Lee, J S a Joo, S K a

a Seoul National University (South Korea)

Author keywords

Fatigue; Grain boundary; PZT; Retention; Selectively nucleated lateral crystallization; Thin film

Indexed keywords

CRYSTALLIZATION; FATIGUE OF MATERIALS; FERROELECTRIC THIN FILMS; GRAIN BOUNDARIES; LEAD COMPOUNDS; MAGNETRON SPUTTERING; NUCLEATION; PEROVSKITE; PHASE TRANSITIONS; PHOTOLITHOGRAPHY; POLARIZATION; RAPID THERMAL ANNEALING;

LEAD ZIRCONATE TITANATE (PZT) THIN FILMS; SELECTIVELY NUCLEATED LATERAL CRYSTALLIZATION (SNLC) METHOD;

DIELECTRIC FILMS;

EID: 0035056471 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.40.229 Document Type: Article

Times cited : (9)

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