Fabrication of the single grained PZT thin film device

Ferroelectrics

Volumn 196, Issue 1-4, 1997, Pages 1-4

  Joo, Jae Hyun ^a   Lee, You Jin ^a   Joo, Seung K I ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY MEASUREMENT; FILM GROWTH; PERMITTIVITY; PEROVSKITE; SINGLE CRYSTALS; SPUTTER DEPOSITION; SUBSTRATES;

LEAD ZIRCONATE TITANATES (PZT); PLATINUM DOTS; SEEDING EFFECT;

THIN FILM DEVICES;

EID: 0030714829     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199708224120     Document Type: Article

References (4)

1. H. Miki and Y. Ohji, Jpn. J. Appl. Phys., 33, 5143 (1994).
2. X. Chen, A. I. Kingon, K. Bellur, O.Auciello, Integrated Ferroelctrics, 5, 59 (1994).
3. K. Okazaki and M. Nagata, J. Am. Ceram. Soc., 56(2), 82, (1973).
4. G. Arlt, Proceeding ISIF'92, 645, (1992).