Mechanical and electric fatigue of PZT(53/47) films on metallic substrates

Integrated Ferroelectrics

Volumn 35, Issue 1-4, 2001, Pages 219-228

  Hauke, T ^a   Beige, H ^a   Giersbach, M ^b   Seifert, S ^b   Sporn, D ^b  

^a MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^b Fraunhofer Institut for Silicatforschung   (Germany)

Author keywords

Fatigue; Piezoelectricity; PZT; Thin films

Indexed keywords

BENDING (DEFORMATION); COERCIVE FORCE; DIELECTRIC PROPERTIES OF SOLIDS; FATIGUE OF MATERIALS; LEAD COMPOUNDS; MICROCRACKS; REMANENCE; STRAIN RATE; STRESSES;

ELECTRIC CYCLING; ELECTROMECHANICAL PROPERTIES; LEAD ZIRCONATE TITANATE; MECHANICAL CYCLING;

FERROELECTRIC THIN FILMS;

EID: 0035027081     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580108016903     Document Type: Conference Paper

References (14)

1. Microelectromechanical systems based on ferroelectric thin films
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7. The impact of domains on the dielectric and electromechanical properties of ferroelectric thin films
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9. Characterisation of the fatigued state of ferroelectric PZT thin-film capacitors
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11. Ferroelectric thin films for piezoelectric micromotors
12. 33
13. Mechanical fatigue in thin films induced by piezoelectric strains as a cause of ferroelectric fatigue