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Volumn 20, Issue 2, 1998, Pages 87-91

A portable scanning electron microscope column design based on the use of permanent magnets

Author keywords

Columns; Miniature; Permanent magnets; Scanning electron microscope

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; MINIATURE INSTRUMENTS; PERMANENT MAGNETS;

EID: 0032030029     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200204     Document Type: Article
Times cited : (15)

References (10)
  • 1
    • 0029132942 scopus 로고
    • Miniature magnetic electron lenses with permanent magnets
    • Adamec P, Delong A, Lencova B: Miniature magnetic electron lenses with permanent magnets. J Microsc 179, Pt. 2, 129-132 (1995)
    • (1995) J Microsc , vol.179 , Issue.2 PART , pp. 129-132
    • Adamec, P.1    Delong, A.2    Lencova, B.3
  • 2
    • 0000426115 scopus 로고
    • Microminiaturization of electron optical systems
    • Chang THP, Kern DP, Muray LP: Microminiaturization of electron optical systems. J Vac Sci Technol B8 (6) 1698-1705 (1990)
    • (1990) J Vac Sci Technol , vol.B8 , Issue.6 , pp. 1698-1705
    • Chang, T.H.P.1    Kern, D.P.2    Muray, L.P.3
  • 5
    • 2642639882 scopus 로고
    • Department of Electrical Engineering, University of Edinburgh, Mayfield Road, Edinburgh EH9 3JL, Scotland, UK
    • Khursheed A: KEOS: Khursheed Electron Optics Software. Department of Electrical Engineering, University of Edinburgh, Mayfield Road, Edinburgh EH9 3JL, Scotland, UK (1992)
    • (1992) KEOS: Khursheed Electron Optics Software
    • Khursheed, A.1
  • 7
    • 15444360784 scopus 로고    scopus 로고
    • Magnet Sales and Manufacturing, Inc., 11248 Playa Court, Culver City, CA 90230
    • Magnet Sales and Manufacturing, Inc., 11248 Playa Court, Culver City, CA 90230
  • 8
    • 0003668999 scopus 로고
    • Image formation in low voltage scanning electron microscopy. Ch. 1, Tutorial texts
    • Reimer L: Image formation in low voltage scanning electron microscopy. Ch. 1, Tutorial texts. SPIE (1993)
    • (1993) SPIE
    • Reimer, L.1
  • 9
    • 0040862726 scopus 로고
    • Practical lens design
    • section 4.1 and 4.6, (Ed. Hawkes PW). Springer-Verlag, New York
    • Rieke WD: Practical lens design. In Magnetic Electron Lenses, section 4.1 and 4.6, (Ed. Hawkes PW). Springer-Verlag, New York (1982)
    • (1982) Magnetic Electron Lenses
    • Rieke, W.D.1
  • 10
    • 15444344169 scopus 로고    scopus 로고
    • In-lens deflectors for a LVSEM magnetic immersion objective lens
    • Zhao Y, Khursheed A: In-lens deflectors for a LVSEM magnetic immersion objective lens. Proc SPIE, Charged Particle Optics III, 3155, 37-46 (1997)
    • (1997) Proc SPIE, Charged Particle Optics III , vol.3155 , pp. 37-46
    • Zhao, Y.1    Khursheed, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.