Novel gas sensor device based on thin MoO3 film and low power-consumption micromachined Si-based structure

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 943-946

  Guidi, Vincenzo ^a   Cardinali, Gian Carlo ^a   Dori, Leonello ^a   Faglia, Guido ^a   Ferroni, Matteo ^a   Martinelli, Giuliano ^a   Nelli, Paolo ^a   Sberveglieri, Giorgio ^a  

^a UNIVERSITY OF FERRARA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

POWER CONSUMPTION; RESPONSE TIME; SENSING LAYER;

CHEMICAL SENSORS;

EID: 0030708057     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)