Recent progress on gas sensors based on semiconducting thin films

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1999, Pages 65-72

  Sberveglieri, G ^a   Baratto, C ^a   Comini, E ^a   Faglia, G ^a   Nelli, P ^a   Dori, L ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MOS DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SUBSTRATES; THIN FILMS;

METAL OXIDE THIN FILMS;

CHEMICAL SENSORS;

EID: 0032678954     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (26)