Ion-chromatographic assay of chromium(VI)-containing semiconductor etchants. Statistical comparison of two columns

Journal of Chromatography A

Volumn 884, Issue 1-2, 2000, Pages 151-159

  Vanatta, L E ^a   Coleman, D E ^b  

^a AIR LIQUIDE   (France)

^b ALCOA TECHNICAL CENTER   (United States)

Author keywords

Calibration curves; Chromate; Etchants; Statistical analysis

Indexed keywords

CHROMIUM; HYDROFLUORIC ACID; NITRIC ACID;

CALIBRATION; CONFERENCE PAPER; DRUG MIXTURE; INTERMETHOD COMPARISON; ION PAIR CHROMATOGRAPHY; PRIORITY JOURNAL; STATISTICAL ANALYSIS; TECHNIQUE;

CALIBRATION; CHROMATOGRAPHY, LIQUID; CHROMIUM; SEMICONDUCTORS;

EID: 0034617329     PISSN: 00219673     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-9673(00)00106-0     Document Type: Conference Paper

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