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Volumn 72, Issue 5, 2001, Pages 565-571

In situ characterisation of thin-film formation in molecular low-temperature plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMS; ELLIPSOMETRY; INFRARED SPECTROSCOPY; ION BOMBARDMENT; LOW TEMPERATURE EFFECTS; MOLECULAR STRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; POLYMERS; SUBSTRATES; SURFACES;

EID: 0034964873     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100815     Document Type: Article
Times cited : (8)

References (26)
  • 18
    • 0004797335 scopus 로고    scopus 로고
    • Infrarotspektroskopische Charakterisierung plasmamodifizierter Polymeroberflächen
    • Thesis, TU Chemnitz
    • (1996)
    • Nitschke, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.