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Volumn 72, Issue 5, 2001, Pages 565-571
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In situ characterisation of thin-film formation in molecular low-temperature plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
ATOMS;
ELLIPSOMETRY;
INFRARED SPECTROSCOPY;
ION BOMBARDMENT;
LOW TEMPERATURE EFFECTS;
MOLECULAR STRUCTURE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA POLYMERIZATION;
POLYMERS;
SUBSTRATES;
SURFACES;
ATTENUATED TOTAL REFLECTION SPECTROSCOPY;
INFRARED REFLECTION ABSORPTION SPECTROSCOPY;
LOW TEMPERATURE PLASMA;
MICROGRAVITY;
POLYMER MODIFICATION;
THIN FILMS;
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EID: 0034964873
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s003390100815 Document Type: Article |
Times cited : (8)
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References (26)
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