Nondestructive observation of mesoscopical surface protrusions by grazing incidence electron microscopy

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 65, Issue 5, 2001, Pages 423-426

  Igarashi, S ^a   Muto, S ^a   Tanabe, T ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Electron energy loss spectroscopy; Grazing incidence electron microscopy; Reflection electron microscopy; Surface blistering; Surface protrusions; Transmission electron microscopy

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; ION IMPLANTATION; MICROSCOPES; NONDESTRUCTIVE EXAMINATION; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

ENERGETIC GAS ION IMPLANTATION; GRAZING INCIDENCE ELECTRON MICROSCOPY; MESOSCOPICAL SURFACE PROTRUSIONS; REFLECTION ELECTRON MICROSCOPY; SINGLE CRYSTALLINE SILICON; SURFACE BLISTERING;

SILICON;

EID: 0034944988     PISSN: 00214876     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet1952.65.5_423     Document Type: Article

References (3)