Observation of surface blistering by grazing incidence electron microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 6 A, 2000, Pages 3555-3556

  Muto, Shunsuke ^a   Matsui, Tsuyoshi ^a   Tanabe, Tetsuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Electron energy loss spectroscopy; Grazing incidence electron microscopy; Reflection electron microscopy; Surface blistering; Transmission electron microscopy

Indexed keywords

DELAMINATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON MICROSCOPY; ION BOMBARDMENT; SILICON; SINGLE CRYSTALS;

BLISTERING; GRAZING INCIDENCE ELECTRON MICROSCOPY; REFLECTION ELECTRON MICROSCOPY;

RADIATION DAMAGE;

EID: 0034204727     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.3555     Document Type: Article

References (5)

1. P. W. Gilberd, P. B. Johnson and I. C. Vickridge: Nucl. Instrum. & Methods B 127&128 (1997) 738.
2. P. B. Johnson, R. W. Thomson and K. Reader: J. Nucl. Mater. 273 (1999) 117.
3. Z. L. Wang: Reflection Electron Microscopy and Spectroscopy for Surface Analysis (Cambridge University Press, UK, 1996) Chap. 5, p. 131.
4. R. F. Egerton: Electron Energy-Loss Spectroscopy in the Electron Microscope (Plenum, New York, 1986) Chap. 5, p. 291.
5. T. Matsui, S. Muto and T. Tanabe: to be submitted to Proc. Int. Conf. Plasma Surface Interaction in Controlled Fusion Devices, May 22-26, 2000, Rosenheim.