High-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling

Computers in Industry

Volumn 45, Issue 1, 2001, Pages 79-98

  Park, Jonghun ^a   Reveliotis, Spyros A ^a   Bodner, Douglas A ^a   Zhou, Chen ^a   Wu, Jennfong ^a   McGinnis, Leon F ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

Colored Petri nets; Flexible automation; High fidelity modeling; Rapid prototyping; The 300 mm fab

Indexed keywords

COMPUTER AIDED MANUFACTURING; DISCRETE TIME CONTROL SYSTEMS; FACTORY AUTOMATION; MATHEMATICAL MODELS; PETRI NETS; PRODUCTION CONTROL; RAPID PROTOTYPING; SEMICONDUCTOR DEVICE MANUFACTURE;

COLORED PETRI NETS;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0035333479     PISSN: 01663615     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0166-3615(01)00082-3     Document Type: Article

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