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Volumn 4408, Issue , 2001, Pages 317-328
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Development of a micromolding process
a a a a |
Author keywords
Focused ion beam; Micromolding process; Nickel beryllium; Polyethylene; Sputtering; Surface integrity
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Indexed keywords
COMPUTER SIMULATION;
COMPUTER SOFTWARE;
ELECTRIC DISCHARGE MACHINING;
GEARS;
ION BEAMS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
NICKEL ALLOYS;
POLYETHYLENES;
SPUTTERING;
VISCOSITY MEASUREMENT;
MICROGEARS;
MICROMOLDING;
MOLDING;
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EID: 0034859543
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.425342 Document Type: Conference Paper |
Times cited : (3)
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References (15)
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