Selective MOVPE of microarray waveguide for densely integrated photonic devices

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 2001, Pages 390-393

  Sudo, S ^a   Kudo, K ^a   Mori, K ^a   Sasaki, T ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; LIGHT INTERFERENCE; LIGHT SOURCES; MASKS; METALLORGANIC VAPOR PHASE EPITAXY; PRESSURE EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROARRAY WAVEGUIDES; PHOTONIC DEVICES;

OPTICAL WAVEGUIDES;

EID: 0034842099     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)