Long-time radiation resistant optical coatings for UV excimer laser applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4347, Issue 1, 2001, Pages 13-16

  Laux, Sven ^a   Bernitzki, Helmut ^a   Klaus, Michael ^a   Lauth, Hans ^a   Kaiser, Norbert ^b  

^a JENOPTIK Laser Optik Systeme GmbH   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Laser induced damage threshold; Plasma assisted deposition; UV optical coatings

Indexed keywords

EXCIMER LASERS; LASER DAMAGE; LIGHT POLARIZATION; LIGHT REFLECTION; MULTILAYERS; OPTICAL BEAM SPLITTERS;

PLASMA-ASSISTED DEPOSITION;

OPTICAL COATINGS;

EID: 0034840363     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425034     Document Type: Article

References (2)

1. Temperature-stable bandpass filters deposited with plasma ion-assisted deposition
2. Ion-assisted deposition of oxide materials at room temperature by use of different ion sources