Hydrogen penetration into Si under wet chemical etching: Experiment and simulation

Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 121-126

  Feklisova, O V ^a   Yakimov, E B ^a   Yarykin, N A ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Diffusion; Hydrogen; Silicon; Wet chemical etching

Indexed keywords

BORON; COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; DIFFUSION; ETCHING; HYDROGEN; OXYGEN; PHOSPHORUS; RELAXATION PROCESSES; SOLUTIONS;

HYDROGEN DIFFUSION; HYDROGEN PENETRATION; WET CHEMICAL ETCHING;

POLYSILICON;

EID: 0034831764     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.80-81.121     Document Type: Conference Paper

References (9)