Structure determination of (Ti,Al)N/Mo multilayers

Thin Solid Films

Volumn 373, Issue 1-2, 2000, Pages 287-292

  Tavares, C J ^a   Rebouta, L ^a   Alves, E J ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; COMPRESSIVE STRESS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; RESIDUAL STRESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; STEEL; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

WAVINESS;

MULTILAYERS;

EID: 0034262862     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01109-3     Document Type: Article

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