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Volumn 11, Issue 2, 2001, Pages
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The prospects of reflectometry and ellipsometry with colorado state university tabletop XUV laser
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CONTAMINATION;
ELECTROMAGNETIC WAVE REFLECTION;
ELLIPSOMETRY;
MULTILAYERS;
REFLECTOMETERS;
THICKNESS MEASUREMENT;
POLARIZERS;
X RAY LASERS;
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EID: 0034826821
PISSN: 11554339
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (20)
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