SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Organometallic Chemistry

Volumn 15, Issue 10, 2001, Pages 833-840

Characterization of SiC and Si3N4 coatings synthesized by means of inductive thermal plasma from disilane precursors

(4) Bouyer, E a Schiller, G a Muller M a Henne, R H a

a UNIVERSITY OF STUTTGART (Germany)

Author keywords

Coating; Disilane; Inductively coupled plasma; Si3N4; SiC; Synthesis

Indexed keywords

SILANE DERIVATIVE; SILICON CARBIDE; SILICON NITRIDE;

ARTICLE; CERAMICS; MATERIAL STATE; SCANNING ELECTRON MICROSCOPY; SYNTHESIS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 0034820533 PISSN: 02682605 EISSN: None Source Type: Journal
DOI: 10.1002/aoc.237 Document Type: Article

Times cited : (15)

References (33)

1
- 0004165903
- John Wiley and Sons Inc.: New York
- (1995) Ceramics Processing, 2nd edn. , pp. 35-53
- Reed, J.S.¹

2
- 0017179025
- (1976) Nature , vol.261 , pp. 683
- Yajima, S.¹ Hayashi, J.² Omori, M.³ Okamura, K.⁴

3
- 0000789399
- (1998) Pure Appl. Chem. , vol.70 , pp. 439
- Aldinger, F.¹ Weinmann, M.² Bill, J.³

4
- 0000974617
- (1997) J. Prakt. Chem. , vol.339 , pp. 401
- Müller, E.¹ Martin, H.P.²

5
- 0032668580
- (1999) J. Am. Ceram. Soc. , vol.82 , pp. 857
- Chew, K.W.¹ Sellinger, A.² Laine, R.M.³

6
- 0030214829
- (1996) J. Mater. Sci. , vol.31 , pp. 4363
- Martin, H.P.¹ Müller, E.² Brendler, E.³

7
- 0001393409
- (1994) Fresenius' J. Anal. Chem. , vol.349 , pp. 160
- Martin, H.P.¹ Irmer, G.² Schuster, G.³ Müller, E.⁴

8
- 0029222490
- (1995) J. Eur. Ceram. Soc. , vol.15 , pp. 703
- Riedel, R.¹ Seher, M.² Mayer, J.³ Szabó, D.V.⁴

9
- 0027912370
- (1993) Surf. Coat. Technol. , vol.60 , pp. 566
- Gerretsen, J.¹ Kirchner, G.² Kelly, T.³ Mernagh, V.⁴ Koekoek, R.⁵ McDonnell, M.⁶

10
- 0026085939
- (1991) Surf. Coat. Technol. , vol.48 , pp. 121
- Lelogeais, M.¹ Ducarroir, M.²

11
- 0032636929
- (1999) Thin Solid Films , vol.341 , pp. 42
- Kim, H.S.¹ Park, Y.J.² Choi, I.H.³ Baik, Y.J.⁴

12
- 0003840273
- McGraw-Hill
- (1995) Thin-Film Deposition: Principles & Practice
- Smith, D.L.¹

13
- 84985165117
- (1988) Adv. Ceram. Mater. , vol.3 , Issue.4 , pp. 423
- Murakami, H.¹ Yoshida, T.² Akashi, K.³

14
- 0026190650
- (1991) Mater. Sci. Eng. , vol.139 , pp. 352
- Pfender, E.¹ Zhu, H.² Lau, Y.C.³

15
- 56949103642
- (1994) Pure Appl. Chem. , vol.6 , pp. 1223
- Yoshida, T.¹

16
- 0026839614
- (1992) Plasma Chem. Plasma Process , vol.12 , pp. 35
- Lu, S.P.¹ Heberlein, J.² Pfender, E.³

17
- 0004291422
- John Wiley & Sons Inc.: London
- (1951) An Introduction to the Chemistry of the Silicones, 2nd edn. , pp. 141-159
- Rochow, E.G.¹

18
- 0003693260
- Conversion of silanes into SiC by RF plasma technology
- Düsseldorf, 15-19 March
- (1999) Proc. of UTSC'99 , pp. 853-858
- Bouyer, E.¹ Müller, M.² Schiller, G.³ Henne, R.⁴

19
- 0004027958
- Plenum Press: New York
- (1994) Thermal Plasmas, Fundamentals and Applications , vol.1 , pp. 213-323
- Boulos, M.I.¹ Fauchais, P.² Pfender, E.³

20
- 0003427458
- Addison-Wesley: Reading, MA
- (1978) Elements of X-Ray Diffraction, 2nd edn. , pp. 99-106
- Cullity, B.D.¹

21
- 0004027835
- Wiley: New York, 576p
- (1994) Structural and Chemical Analysis of Materials: X-Ray, Electron and Ion Spectrometry
- Eberhart, J.P.¹

22
- 0027542644
- (1993) J. Mater. Sci. , vol.28 , pp. 659
- Zhu, C.W.¹ Zhao, G.Y.² Revankar, V.³ Hlavacek, V.⁴

23
- 0030214828
- (1996) J. Mater. Sci. , vol.31 , pp. 4327
- Huang, Z.R.¹ Laing, B.² Jiang, D.L.³ Tan, S.H.⁴

24
- 21844512157
- (1995) Plasma Chem. Plasma Process , vol.15 , pp. 581
- Rao, N.¹ Girshick, S.² Heberlein, J.³ McMurry, P.⁴ Jones, S.⁵ Hansen, D.⁶ Micheel, B.⁷

25
- 0001464541
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1430
- Carmer, C.S.¹ Frenklach, M.²

26
- 0001022405
- (1997) Fresenius' J. Eur. Ceram. Soc. , vol.17 , pp. 659
- Martin, H.P.¹ Müller, E.² Irmer, G.³ Babonneau, F.⁴

27
- 0001219355
- (1996) J. Eur. Ceram. Soc. , vol.16 , pp. 721
- Monthioux, M.¹ Delverdier, O.²

28
- 0032452205
- (1998) J. Eur. Ceram. Soc. , vol.18 , pp. 1885
- Kurtenbach, D.¹ Martin, H.P.² Müller, E.³ Roewer, G.⁴ Hoell, A.⁵

29
- 0029288369
- (1995) J. Mater. Sci. , vol.30 , pp. 2008
- Soucy, G.¹ Jurewicz, J.W.² Boulos, M.I.³

30
- 33845281153
- (1987) J. Phys. Chem. , vol.91 , pp. 5361
- Guth, J.R.¹ Petuskey, W.T.²

31
- 0035541880
- (2000) Plasma Chem. Plasma Process. , vol.21 , pp. 523
- Bouyer, E.¹ Schiller, G.² Müller, M.³ Henne, R.⁴

32
- 0004217191
- John Wiley & Sons: Chichester
- (1996) Spray Atomization and Deposition , pp. 49-153
- Lavemia, E.¹ Wu, Y.²

33
- 0003645394
- John Wiley and Sons Inc.: New York
- (1997) Physical Ceramics, Principles for Ceramic Science and Engineering , pp. 19-72
- Chiang, Y.M.¹ Birnie, D.² Kingery, W.D.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.