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Volumn 2, Issue , 1998, Pages 605-608
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Deposition of droplet-free films by vacuum arc evaporation - results and applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
AMORPHOUS FILMS;
DEPOSITION;
EVAPORATION;
ION BEAMS;
METALLIC FILMS;
METALLIZING;
MICROELECTRONICS;
PROTECTIVE COATINGS;
SUBSTRATES;
TITANIUM NITRIDE;
VACUUM;
DROPLET-FREE FILMS;
VACUUM ARC EVAPORATION;
ELECTRIC ARCS;
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EID: 0032298681
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (16)
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