NbNx thin film resistors for cryogenic application

Thin Solid Films

Volumn 384, Issue 2, 2001, Pages 294-297

  Schicke, M ^a   Sabon, P ^a   Schuster, K F ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC EQUIPMENT; ELECTRIC RESISTANCE; NIOBIUM COMPOUNDS; REACTIVE ION ETCHING; SPUTTER DEPOSITION; THERMAL CONDUCTIVITY; THIN FILM DEVICES;

THIN FILM RESISTORS;

RESISTORS;

EID: 0034818131     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01863-0     Document Type: Article

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