Optimization of niobium thin films by experimental design

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2158-2166

  Knappe, S ^a   Elster, C ^a   Koch, H ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031500127     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580528     Document Type: Article

References (20)

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