New micromachined membrane switches in silicon technology

Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts

Volumn , Issue , 2001, Pages 117-121

  Hiltman, K ^a   Schumacher, A ^a   Guttmann, K ^a   Lemp, E ^a   Sandmaier, H ^a   Lang, W ^a  

^a Institute for Micromachining and Information Technology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONTACTS; ELECTRIC LOADS; MICROMACHINING; SILICON; SUBSTRATES; THIN FILMS;

MICROMACHINED MEMBRANE SWITCHES;

ELECTRIC SWITCHES;

EID: 0034797476     PISSN: 03614395     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Dynamic micromechanics on silicon: Techniques and devices
2. The microreed, an ultra-small passive meres magnetic proximity sensor designed for portable applications
3. Simulation, design and fabrication of electroplated acceleration switches
4. A thermo-mechanical relay with microspring contact array
5. Latching micro magnetic relays with multistrip permalloy cantilevers
6. Micromachined switches for low electric loads
7. Das verhalten elektrischer schaltkontakte bei kontaktkraeften im millinewton-bereich