Electrical properties of polycrystalline and epitaxially grown PZT thin films

Key Engineering Materials

Volumn 216, Issue , 2001, Pages 83-86

  Tokita, K ^a   Aratani, M ^a   Ozeki, T ^a   Funakubo, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Dielectric constant; Epitaxial; Leakage current; Orientation; Polycrystalline; PZT; Remanent polarization

Indexed keywords

CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FERROELECTRICITY; FILM GROWTH; FILM PREPARATION; HYSTERESIS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLARIZATION; POLYCRYSTALLINE MATERIALS;

EPITAXIAL FILMS;

THIN FILMS;

EID: 0034782797     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (8)