Nanometer-scale dimensional metrology with noncontact atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 527-539

  Marchman, Herschel M ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRITICAL DIMENSION METROLOGY; NANOMETER-SCALE DIMENSIONS;

ATOMS; DISTANCE MEASUREMENT; MICROELECTRONICS; PERFORMANCE;

SCANNING ELECTRON MICROSCOPY;

EID: 0029728396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)