Depth profiling of multi-layer samples using femtosecond laser ablation

Journal of Analytical Atomic Spectrometry

Volumn 16, Issue 6, 2001, Pages 616-621

  Margetic, V ^a   Bolshov, M ^a   Stockhaus, A ^a   Niemax, K ^a   Hergenroder R ^a  

^a LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER ALLOYS; IRON; LASER PULSES; MASS SPECTROMETRY; MULTILAYERS; SILICON; SILVER; SOLID STATE LASERS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; TITANIUM COMPOUNDS;

DEPTH PROFILING; FEMTOSECOND LASER ABLATION; GAUSSIAN BEAM PROFILE; LASER INDUCED BREAKDOWN SPECTROSCOPY; TIME OF FLIGHT MASS SPECTROMETRY;

LASER ABLATION;

EID: 0034743025     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b100016k     Document Type: Article

References (36)