Field emission studies of nitrogen-doped diamond-like carbon films deposited using CH4/N2/Ne and CH4/NH3/Ne RF plasmas

International Journal of Modern Physics B

Volumn 14, Issue 2-3, 2000, Pages 295-300

  Kuo, M T ^a   May, P W ^a   Gunn, A ^a   Marshall, J C ^a   Ashfold, M N R ^a   Rosser, K N ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DIAMOND; NITROGEN; SILICON;

COMBUSTION; CONFERENCE PAPER; FILM; GROWTH RATE; PRECURSOR; RADIOFREQUENCY;

EID: 0034731779     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979200000297     Document Type: Conference Paper

References (10)